A test structure for reliability analysis of CMOS devices under DC and high frequency AC stress

A test structure for reliability analysis of MOSFETs in CMOS inverters under DC and high frequency AC stress has been presented. It has an input pulse generation block with a ring oscillator, monitor inverter blocks and Kelvin connected selector switches. Detailed I - V characteristics of MOSFETs in the monitor inverters were measured and the degradation by HCI and BTI in nMOS and pMOS devices were analyzed. The dominant degradation origins in nMOS and pMOS devices can be attributed to HCI and NBTI, respectively.