Efficient Calculation of Inductive and Capacitive Coupling Due to Electrostatic Discharge (ESD) Using PEEC Method

The coupling from electrostatic discharge (ESD) events is effectively calculated using the partial element equivalent circuit (PEEC) method, both in time and frequency domains. The PEEC method has several advantages in predicting dominant coupling sources and waveforms of ESD. Two victim structures were designed so that the inductive or capacitive coupling could be dominant. The calculation of ESD coupling is validated by comparison with measurements and the finite-element method solver in frequency domain. The waveform of the ESD inductive coupling is also validated with measurements and the finite-difference time domain solver in time domain.