A novel electrostatic vibration energy harvester array using sidewall electric field

This paper presents a novel electrostatic vibration energy harvester array for micron or sub-micron scale integration. Unlike traditional electrostatic harvesters which adopt planar plate capacitor structure, this work utilizes sidewall electric field for induction, and thus device dimension can be reduced to micron or sub-micron scale. The proposed harvester array is simulated and optimized. For 1mm
²
area of array (optimal unit electrode size 6.5μm×6.5μm), generated current reaches 0.82μA @10μm, 20Hz sinusoidal vibration. Maximally, 6.45μW output power is obtained on 10MΩ load resistance.