A low-noise SC-type interface asic for a closed-loop MEMS gyroscope

This paper presents a low-noise SC-type interface ASIC for a closed-loop MEMS vibratory gyroscope. An AC sensing method is employed to convert the amplitude-modulated capacitive signal to voltage signal. The interface CSA (charge sensitive amplifier) is followed by a CDS (correlated double sampling) circuit to reduce low frequency noise and eliminate offset. The system realizes a closed-loop control in the driving and sensing mode. The ASIC is fabricated in 0.18um CMOS process and occupies 2.9×1.7 mm
²
.