Collisional-radiative model for the diagnostics of low pressure inductively coupled krypton plasma

The physics driving the low and atmospheric pressure discharges have been extensively studied using plasma diagnostics based on optical emission spectroscopy (OES). A popular approach is based on the simulation of emission spectrum, obtained from a suitable population kinetic model accounting the various population and depopulation mechanisms, using specific plasma characteristics as the adjustable parameters
¹
. The accuracy of such approach highly depends upon the cross sections used in the kinetic-model. We have recently showed the effectiveness of using fully relativistic fine-structure cross sections for the analysis of low pressure argon plasmas
²
. In the present work, we have developed a collisional- radiative (CR) model using our fine-structure relativistic-distorted wave (RDW) cross sections. This model is applied to the study a low pressure inductively coupled (ICP) Kr plasma for which the literature is scarce.