Modeling and optimization of magnesiothermically-formed porous silicon in silicon-on-insulator microresonator sensors

We develop a model for silicon-on-insulator microresonators with magnesiothermically-formed porous silicon cladding possessing three-dimensional interconnected pores. Investigation of waveguide design and geometrical parameters indicates an optimized areal mass sensitivity of ∼ 0.2 pm/(pg/mm
²
).