Development of a CMOS compatible biophotonics platform based on SiN nanophotonic waveguides

We report on the development of low-loss photonic components fabricated in low-temperature PECVD SiN for the development of a CMOS compatible biophotonics platform. We discuss modeling and experimental demonstration of strip waveguides, MMI and evanescent couplers, fractal trees for power distribution and AWGs and waveguide-integrated resonators as wavelength selective components.