A novel capacitive temperature sensor for a lab-on-a-chip system

A novel capacitive temperature sensor for a lab-on-a-chip (LOC) system is presented. The fluidic LOC system is for biological and chemical analysis, and it is fabricated by the Silicon-On-Glass (SOG) process. Fabrication process of the capacitive temperature sensor is compatible with the LOC system. The temperature sensor will provide a temperature monitor and control to the LOC system. Experimental results show that the sensor provides a sensitivity of 40.73fF/°C in the 0 to 80 °C range. In addition, the preliminary results of the proposed temperature sensor show a good linearity and repeatability performance over the whole testing range, which is important for practical use of temperature sensors.