Antenna-coupled microbolometer-based THz detectors for room temperature beam profile imaging of the photoconductive THz pulse emitters

Properties of antenna-coupled microbolometers optimized for room temperature 300 GHz and 600 GHz resonant frequency detection is reported. Dipole antenna placed on freestanding SiN membrane is used to couple THz radiation power to the titanium-based thermo-resistor. We demonstrate that antenna-coupled micro-bolometers can be well suited for beam profile imaging of the THz pulses emitted by the photoconductive antenna switch.