Electrical and structural properties of nanotetrapod zinc oxide thin films prepared with different deposition temperature

Nanotetrapod zinc oxide (ZnO) thin films have been deposited by thermal chemical vapor deposition (TCVD) technique. The films were deposited at 700°C and 800°C to study the temperature effect of physical properties of the nanotetrapod ZnO thin films. From XRD result shows the highest peak can observed from sample 700°C at (002) orientation. It was found that the size of nanotetrapod increased with increased of deposition temperature. The energy dispersive X-ray spectrometer (EDX) spectrum shows that the grown product contains zinc and oxygen only. At 800°C show the minimum of resistivity for the thin film which is 1.10 ohm. cm. Photoluminescence measurement shows a sharp peak ultraviolet emission at 380 nm and high intensity visible peak at 700°C because of defect due to oxygen vacancy and crystallization of ZnO nanotetrapod.