Fabrication and characterization of wafer-bonded cMUT arrays dedicated to ultrasound-image-guided FUS

In this paper, the development of wafer-bonded cMUTs arrays, which will be implemented on a dual-mode probe dedicated to liposomes activation and high frequency imaging, is presented. The process flow is briefly described, and optical and electrical characterizations are reported. Then, experimental electro-acoustic tests confirming the expected performances of each array are presented and discussed.