Structural studies of light-induced anodic aluminum oxide

Light-induced anodisation (LIA) is an innovative method to produce oxide films on the surface of crystalline silicon solar cells in an inexpensive electrochemical bath under light illumination. LIA of aluminum to form anodic aluminium oxide (AAO) has been demonstrated to provide excellent passivation and anti-reflection effects.. This article reports on recent studies on the structural properties of AAO layers using ellipsometry, microscope, and a few modelling techniques. The effects of the light intensity and the thickness of the aluminum (Al) precursor on the refractive index, porosity and barrier layer thickness of the AAO films are revealed. The effects of the applied voltage on the AAO growth rate are investigated. All the studies are served to provide a guideline to quick formation of uniform AAO layers for effective passivation and anti-reflection.