Shield effect of floating electrode for power efficient micro-plasma VUV light source

MEMS plasma source for VUV light source is improved. The floating electrode has been introduced for the power efficient discharging. Shielding the major part of that electrode is found to be further effective for saving the power. The ignition and sustaining powers are 5 and 4.5W, respectively. They are lower than the value for ICP type micro-plasma reported including the bulk setup.