A two-port piezoelectric micromachined ultrasonic transducer

A two-port piezoelectric micromachined ultrasound transducer (pMUT) has been demonstrated using aluminum nitride (AlN) as the piezoelectric material with good linearity, high acoustic pressure per unit input voltage, and enhanced electromechanical coupling factor. Experimental data are found to match well with values predicted by the theoretical models. The magnitude of the second harmonic of a two-port pMUT is characterized as 485% lower than that of a conventional one-port pMUT.