Loss Reduction Technique in Ferroelectric Tunable Devices by Laser Microetching. Application to a CPW Stub Resonator in $X$ -Band

Ferroelectric materials are known to be lossy at microwaves. A local microetching technique based on laser ablation is implemented here to reduce the insertion loss of highly tunable devices fabricated on KTa
_1–x
Nb
_x
O
₃
(KTN) ferroelectric thin films. The relevance of this approach is studied in
X
-band by comparing numerically and experimentally the performance of a frequency-tunable coplanar waveguide stub resonator before and after KTN microetching. The experimental data demonstrate a large loss reduction (by a factor 3.3), while keeping a high-frequency tunability (47%) under a moderate biasing static electric field (80 kV/cm). This approach paves the way for the design of ferroelectric reconfigurable devices with attractive performance in
X
-band and even beyond.