Imaging of through-silicon vias using X-Ray computed tomography

X-Ray computed tomography (CT) can be useful in evaluating defects in through-silicon vias (TSVs). X-Ray CT images of two different TSV processes are presented; copper TSVs used for stacked memory on logic and tungsten TSVs used for power amplifiers. It is found that TSVs in the edge exclusion region are susceptible to defects from the TSV etch and TSV metallization processes.