A study of MEWMA controller for drifted MIMO non-squared process

This paper studied the MEWMA controllers used to control the drifted MIMO non-squared process in semiconductor manufacturing industry. We compared the performance of the existing controllers. In order to overcome the case that existing singular matrix in the controllers, we proposed to use the Moore-Penrose inverse when matrix is not invertible. Through analysis of the stability of the controlled process, the stability condition is not relevant to what types the input takes. At last an example shows the effectiveness of our results.