Design and simulation of 10 MHz MEMS oscillator

Design and analysis of a 10MHz CMOS-MEMS oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam (CC-beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with a supporting amplifier circuit. The OP AMP achieves a gain of 21dB at VDD of 1.8 V and VSS of −1.8 V. The two-stage CMOS OP AMP is combined with 10MHz CC-beam resonator to create an oscillator at the frequency of ∼10MHz with loop gain of 16dB. The oscillator is simulated using Cadence Design Systems™.