A 1.1 THz micromachined on-wafer probe

This paper presents a micromachined probe for on-wafer measurements of circuits in the WR-1.0 waveguide band (0.75 - 1.1 THz). The probe shows a measured insertion loss of less than 7 dB and return loss of greater than 15 dB over most of the band. These are the first reported on-wafer measurements above 1 THz.