Extended Bandwidth Lorentz Force Magnetometer Based on Quadrature Frequency Modulation

In this paper, a Lorentz force magnetometer demonstrates quadrature frequency modulation operation. The Lorentz force magnetometer consists of a conventional 3-port resonator, which is put into oscillation by electrostatic driving and sensing. The bias current flowing through the resonator is proportional to the displacement, and generates Lorentz force in quadrature with the electrostatic force. As a result, the Lorentz force acts as an equivalent spring and the magnetic field can be measured by reading the change in oscillation frequency. The sensor has a sensitivity of 500 Hz/T with a short-term noise floor of 500 nT$\surd $ Hz. The bandwidth of the sensor is increased to 50 Hz, a factor of 12 greater than that of the same resonator operating in amplitude-modulated mode. The short-term noise floor within 50-Hz bandwidth is comparable with CMOS Hall-effect sensors.