Terahertz horn antenna with double-layer corrugated V groove for gain enhancement

This paper proposed a low-profile terahertz (THz) horn antenna with double-layer corrugated V groove for gain enhancement based on Si-based MEMS technology. The proposed antenna possess bandwidth for VSWR below 1.6 from 275GHz to 750GHz. The double-layer corrugated V groove can be effectively used to improve the gain and side-lobe of antenna from calculation and optimization by using three-dimension electromagnetic full-wave finite element method (FEM) software package Ansys High Frequency Structure Simulator (HFSS). Meantime, this work demonstrates the MEMS technology suitable for the design of THz devices.