Environmental control in semiconductor manufacturing

Semiconductor manufacturing is among the world's most important and technologically advanced industries. Although it once enjoyed a reputation as a “clean” industry, in recent years that reputation has been tarnished by allegations of environmental, worker health, and human reproductive problems stemming from semiconductor manufacturing operations. It is well-documented
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that making semiconductor devices requires hazardous chemicals that, if not properly used or controlled, could result in serious problems to the facility, its work force, or the community where it exists. This paper first discusses early attempts at semiconductor manufacturing, then tracks technology, early environmental controls, growth in regulatory requirements, and programs implemented to insure regulatory compliance in all areas of environmental concern.