An efficient earth magnetic field MEMS sensor: Modelling and experimental results

The paper presents the experimental results and performance indexes of a new z-axis Lorentz force MEMS magnetometer with simple design, reduced dimensions and high efficiency. An ad-hoc formulated multi-physics approach is exploited to compute the sensor dynamics. Possible parasitic acceleration sensitivity is mechanically canceled in the proposed device. Optimality of the proposed configuration is discussed by means of an ad hoc formulated parameter optimization approach.