Commercialization of world's first piezomems resonators for high performance timing applications

We present in this paper IDT's efforts and progress in the development and commercialization of world's first piezoelectric MEMS resonators for high performance timing applications. IDT's pMEMS™ resonators consist of a piezoelectric material on a single-crystal silicon layer substrate. Based on pMEMS™ technology, IDT is now shipping world's lowest jitter MEMS Oscillators with less than 0.3ps RMS jitter (12kHz to 20MHz). In addition, pMEMS™ oscillators have demonstrated great long term frequency stability and immunity to shock / vibration testing.