New estimation method of short circuit inductance of coplanar probe for on-wafer scattering parameter measurement

The short impedance standard is the easiest fabricated in Open-Short-Load (OSL) calibration method for on-wafer scattering parameter (S-parameter) measurement. The fabrication and the definition of the other two impedance standard are more questionable. A new extraction method is presented to determine short inductance of coplanar waveguide (CPW) probe. Based on this consideration, other open capacitance and load inductance in OSL calibration method are compensated. The method needs only imperfective OSL impedance calibration kits and another standard offset short. It may improve on-wafer S-parameter accuracy of OSL calibration, which is the same as Thru-Reflect-Line (TRL) calibration. The experimental verification of the new estimation algorithm is given by using the designed and fabricated OSL calibration kit and standard offset short on Al
₂
O
₃
substrate up to 50 GHz.