Modelling of cantilever based MEMS RF switch

This paper deals with the electro-mechanical and electro-magnetic model of an electro statically actuated RF MEMS switch, Simple 1-D model for pull-in voltage is presented, along with the 2-port equivalent circuit network representation used for series switch. The Mechanical, Electrostatic and Electromagnetic analysis of the designed miniature RF MEMS cantilever beam is performed using COVENTORWARE tool. RF characterization has been carried out in the range of 1 to 40 GHz to provide return loss (S11), insertion loss (S21) between up (un-actuated) and down (actuated) states of the RF MEMS beam. It has been seen that the switch, so designed, results in low-loss performance.