The acoustic method of the noncontact determination of thin films conductivity

The paper is devoted to the development of noncontact acoustic method of the determination of thin film conductivity. The method is based on the registration of the changes in velocity and attenuation of acoustic waves in the piezoelectric plate due to placing the structure “film under study - dielectric substrate” on the certain distance from the plate. The limits of the measured values by the suggested method are determined. The theoretical data are compared with the results of the experiment.