Microwave acoustic properties of diamond single crystal as a substrate for High-overtone Bulk Acoustic Resonator

The piezoelectric layered structure Me1/AlN/Me2/single crystalline diamond was developed. Acoustic properties of number the layered structures have been studied on microwave frequency band. The frequency dependence of quality factor was estimated as Q·f ≈ 5.6·10
¹³
. The pressure and temperature influence on the resonant frequency have been studied. First resonant overtones with Q ∼ 2500 were observed on super high frequencies ∼ 19.5 GHz.