Development of cell culture microdevice for regulation of cell functions based on nanomechanical stimulation

In order to elucidate the effects of nanomechanical stimulation on the regulation of cellular functions, we have been developing a cell culture microdevice integrated with piezoelectric thin film actuators. In this paper, we propose a new geometric configuration of the device to allow cell culture on a relatively flat surface and in an open space. An improved fabrication process for PZT actuators overcame a serious problem that sometimes occurred in the previous process; photoresist patterned on PZT film cannot be completely removed due to its degradation in a dry etching process. Then we demonstrate the driving performance of a fabricated prototype microdevice. Moreover, individual cells can be arranged precisely in the desired positions of the PZT actuators by a positive dielectrophoretic force at frequencies above 100 kHz with an application of an AC voltage of 20 V
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