A 13.56 MHz high power and high efficiency RF source

This paper describes design and implementation of highly efficient, low cost 13.56 MHz, 1.5kW RF source for ICP-AES. The design is based on current mode class-D power amplifier built using push-pull hybrid DRF1300. Prototype power amplifier achieves drain efficiency of 90% for power output above 1kW. Design shows that CMCD can achieve better efficiency compared to VMCD.