Fabrication and performance of a miniaturized 64-element high-frequency endoscopic phased array

We have developed a 40-MHz, 64-element phased-array transducer packaged in a 2.5 × 3.1 mm endoscopic form factor. The array is a forward-looking semi-kerfed design based on a 0.68Pb(Mg
_1/3
Nb
_2/3
)O
₃
-0.32PbTiO
₃
(PMN-32%PT) single-crystal wafer with an element-to-element pitch of 38 μm. To achieve a miniaturized form factor, a novel technique of wire bonding the array elements to a polyimide flexible circuit board oriented parallel to the forwardlooking ultrasound beam and perpendicular to the array was developed. A technique of partially dicing into the back of the array was also implemented to improve the directivity of the array elements. The array was fabricated with a single-layer P(VDF-TrFE)-copolymer matching layer and a polymethylpentene (TPX) lens for passive elevation focusing to a depth of 7 mm. The two-way-6-dB pulse bandwidth was measured to be 55% and the average electromechanical coupling (keff) for the individual elements was measured to be 0.62. The one-way -6-dB directivities from several array elements were measured to be ±20°, which was shown to be an improvement over an identical kerfless array. The -3-dB elevation focus resulting from the TPX lens was measured to be 152 μm at the focal depth, and the focused lateral resolution was measured to be 80 μm at a steering angle of 0°. To generate beam profiles and images, the probe was connected to a commercial ultrasound imaging platform which was reprogrammed to allow for phased array transmit beamforming and receive data collection. The collected RF data were then processed offline using a numerical computing script to generate sector images. The radiation pattern for the beamformed transmit pulse was collected along with images of wire phantoms in water and tissue-equivalent medium with a dynamic range of 60 dB. Finally, ex vivo tissue images were generated of porcine brain tissue.