A simple nonlinear mBVD model parameter extraction method for intrinsically switchable ferroelectric FBARs

In this paper, a method for extracting the nonlinear mBVD model parameters for intrinsically switchable ferroelectric thin film bulk acoustic resonators (FBARs) is presented. Ferroelectric FBARs based on BST exhibit an electric field induced piezoelectric effect. This property allows for the design of ferroelectric FBAR based tunable and switchable circuits. Simple yet accurate nonlinear models are essential to accurately predict the nonlinear behavior of such devices. This paper provides the detailed parameter extraction method for BST FBARs. Simulation results for the extracted nonlinear mBVD model for a BST FBAR show very good agreement with measurement results over a wide range of dc bias voltages.