Electrical tuning of dielectric resonators with LIGA-MEMS

A novel dielectric resonator (DR) resonant frequency tuning concept implemented, for the first time, in a micro-electro-mechanical-systems (MEMS) “Lithography, Electroplating and Molding” (LIGA) process, is presented. The complete system, except for the DR, is manufactured in the LIGA process. A description of the structure, consisting of a transmission line-DR system, coupled with a metallic Mach-Zenhder-Interferometer (MZI), is given. Simulation results, which show the resonance frequency tuning, the low Q-factor-reduction and first measurements with manufactured samples, as proof of concept, are included.