Film manometric thermocouple transducer

An analog of the PMT-2 tube manometer thermocouple transducer fabricated using thin-film technology is described. The transducer may have a wider range of application because the source and the heat detector are separated and the output signal is higher due to larger number of thermocouples. The transducers fabricated on mica substrates operate at pressures ranging from 760 to 10/sup -5/, 10/sup -1/ to 10/sup 3/ and 50 to 1 torr, those on polyimide substrates operate in the range of 10/sup 3/-10/sup 2/ torr. The transducers have passed mechanical and climatic, a 500-h time-to-failure, and ozone tests.