A microplasma chip for radical monitor

A chip device of generating atmospheric pressure microplasma was fabricated and characterized for light source in a radical monitoring system. The chip consisted of a Si substrate with channels and a lid of MgF
₂
glass plate with a floating electrode. The chip (20mm × 3mm) generated microplasma of φ200mm under the conditions of 20-40W VHF power and He gas flow of 500sccm. The microplasma emitted clear atomic spectral lines and molecular band spectra, which can be used as a light source in adsorption spectroscopy.