Fabrication of electrically-pumped resonance-cavity membrane-reflector surface-emitters on silicon

Various lasers and light sources on Si via heterogeneous integration of Si/III–V have been reported based on direct growth on Si [1] or wafer bonding technology [2–4]. We reported earlier optically-pumped Si membrane-reflector vertical-cavity surface-emitting lasers (MRVCSELs) fabricated by low-temperature membrane transfer printing processes [5, 6]. Here we report electrically-pumped devices based on an intra-cavity contact configuration.