Effect of thermal treatment on the structure and mechanical properties of coatings based on (Ti, Hf, Nb, Si)N

The paper presents the results of original research of nanostructured coatings based on (Ti, Hf, Nb, Si)N deposited by CAVD method. Coatings were investigated by several complementary methods of the structural element-analysis, such as: proton microbeam (μ-PIXE), micro- and nano-electron beam (EDX and SEM analysis), XRD. Elemental composition, microstructure, residual stresses in nanograins, profiles of atomic distribution on the surface of coatings in 3D view, phase composition, texture of surface were determined before and after annealing at temperatures 300, 500, 800, 1000°C (annealing time τ = 30 min).