Understanding workfunction tuning in HKMG by Lanthanum diffusion combining simulations and measurements

In this paper, we propose a method to extract effective diffusion coefficients for Lanthanum in HfO
₂
for an HKMG technology. TCAD diffusion simulations is combined to the analysis of theoretically expected Work Function shift due to Lanthanum at the HfO
₂
/SiO
₂
interface and experimentally extracted Work Function value under various thermal budgets, obtaining a good agreement between simulations and experimental data.