A CIM system with advance control functions for next generation semiconductor devices

In this paper, a framework for 'advance control' to prevent various troubles on lot processing in ULSI development and fabrication lines is described. The features of the framework are preventing in advance troubles caused by the deterioration of equipment performance by a computer system and bringing abilities of experts on semiconductor technology into full operation. We have developed a Computer Integrated Manufacturing (CIM) system with advanced control functions to realize this framework. The multimedia information system is one of the new methods which can transfer the abnormal information to experts at any location and any situation, immediately.