Ultra-high density floating gate devices using self-assembled 2D arrays of gold nanoparticles

We present a method for fabricating ultrahigh density floating gate devices using highly ordered 2D arrays of gold nanoparticles (8×10
¹¹
particles/cm
²
) as the charge storage nodes. The removal of polystyrene ligands, after array formation, was essential for obtaining reliable memory window. Surprisingly, the memory window of devices using arrays with 4 nm spacing was found to be larger than that of devices using arrays with 2 nm spacings.