Enhanced perfomance of sensor/actuator integrated piezoelectric microcantilever by using tetragonal compositon PZT thin films

We have largely enhanced the performance of sensor/actuator integrated piezoelectric microcantilevers for electrostatic field sensors, by using tetragonal composition Pb(Zr
_0.3
, Ti
_0.7
)O
₃
(tetr-PZT) thin films instead of MPB composition Pb(Zr
_0.52
, Ti
_0.48
)O
₃
(MPB-PZT) ones. We have succeeded in optimizing wake-up condition to enhance the piezoelectric property of the tetra-PZT thin films. The maximum output voltage of the sensor/actuator integrated microcantilevers is about 6 times larger than those using MPB-PZT thin films.