Vibration Sensor with Floating Gate Based on Standard CMOS Process

A vibration sensor with floating gate based on standard CMOS and post-CMOS processes is presented. The vibrating membrane is released with one simple metal sacrificial layer removal step, which is very cost-efficient and fully CMOS compatible, enabling monolithic integration of circuitry. Test results show that the proposed sensor can work properly, and have good frequency linearity with the test shaking system, which exhibits prefect linearity up to 99.94%.