AutoMM: automatic generation of dynamic macromodels for MEMS devices

We report on the development of a new CAD tool, AutoMM, which supports the automatic generation of dynamic macromodels for a broad class of MEMS devices. The tool is demonstrated by producing a 2 DOF macromodel of the Analog Devices ADXL76 airbag accelerometer. Considerably improved functionality is obtained over earlier models of the device, including prediction of cross-axis response. Excellent agreement is obtained between simulations and measured data.