A normally-closed, bimetallically actuated 3-way microvalve for pneumatic applications

A new normally-closed 3-way microvalve for pneumatic applications is presented for the first time. The valve is driven by a bimetallic actuation principle. This paper discusses the dimensioning and design, the fabrication and the experimental results of the 3-way valve. The valve is designed to control differential pressures of 1000 kPa. Flow rates up to 800 ml/min for dry air at 600 kPa can be achieved. The power consumption is about 1 W. The valve has been tested successfully in an ambient temperature range from 0 to 50/spl deg/C.