Results of a multi-site round-robin to examine probed measurements of an impedance standard substrate

The results from a round-robin measurement using microwave coplanar waveguide probes are presented. The round robin was initiated and coordinated by the TRW Equipment Management Center's Measurement Engineering Department (MED). Ten probe sites, within and outside of TRW, participated in the round-robin. Each participant used the same Cascade Microtech impedance standard substrate, the same measurement and calibration structures, the same calibration method, and the same network analyzer conditions. S-parameter measurements were performed over the frequency range of 0.045-26.5 GHz on a 10-dB attenuator and a 20-dB attenuator. In addition to the data comparison between the various probe sites, measurement repeatability results obtained by TRW are presented.<
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