Fabrication and package of microfluidic dielectrophoretic chip for trapping two particles

A novel microfluidic dielectrophoretic chip has been fabricated and packed to trap the small particles with different sizes. In order to trapping different particles, the microfluidic chip integrated with U-shaped column and microelectrodes is designed and fabricated. In this paper, the particular process of fabricate micro-electrodes, micro U-shaped columns and microchannels is presented. The results show that the chip can complete pairing two particles with different sizes successfully.