Development of flexible neural probes using SU-8/parylene

A new process for making SU-8 neural probe with fluidic channels and gold electrodes based on multilayered thin parylene and SU-8 is presented here. This approach can realize a thin 15 μm gap between electrode surface and neural cells. The thin gap will help to enhance the neural signal acquisition. Fluidic testing and mechanical testing are conducted to ensure the device reliability.