Approximate evaluation of effective permittivity for metal dummies in a CMOS chip using electrostatic capacitor model

Approximate evaluation method of effective permittivity for metal dummies in a CMOS chip is proposed. The effective permittivity is calculated using electrostatic capacitor model, which enables very quick estimation of the effective permittivity. Calculated effective permittivity coincides with the one analyzed by electromagnetic eigenmode analysis within the difference of 3.2 %. For verification, calculated S-parameters of the real model and approximated effective material model are compared. They agreed very well.