Silicon micro-pillar filter fabrication for DNA separation in Lab-on-chip system

In this paper we report on the silicon fabrication technology for developing of a Lab-on chip system. The main components in the system are mixers, micorector cavities, coarse filter and micropillar filters. Silicon fabrication technology offers distinct advantages in developing (LOC) platforms. It allows for very accurate control of size and uniformity of structures. Many different structures from sub-microns to millimeter range can be integrated in the same platform. At the same time it allows economy of scales for future commercial products. We will report on different fabrication steps required to make the complete LOC system on Si. We will also report on the successful separation of double strand DNA fragments using our micropillar filters. It acts as the column in a high performance liquid chromatography (HPLC) system. We show that 11 DNA components, in a large range (10-300bp) can be separated.