Hydrothermal deposition of the PZT film and applications of piezoelectric actuators

In this paper, PZT film has been deposited on Ti substrate by using a hydrothermal method. The hydrothermal reaction solution was stirred by 2 types of methods. One mixing method was a rotation mixing method and the other was an ultrasonic vibration mixing method. Bimorph actuators were fabricated and evaluated with displacement measurement. Because of holding the autoclave, the ultrasonic vibration mixing device was less of a load to the substrate. Therefore, micro-positioning stage has been fabricated on a comparatively large and high-aspect ratio titanium structure by using the ultrasonic vibration mixing device. The hydrothermal method can easily deposit on the three-dimensional substrate. Thus, we have deposited PZT film on a hemispherical shape Ti substrate and fabricated an ultrasonic transducer by using the rotation mixing device. The ultrasonic transducer was evaluated by under water experiment.